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Keenan Woods
Keenan Woods
Senior Technical Program Manager, Edwards Vacuum
Verificeret mail på edwardsvacuum.com
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Citeret af
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Unique chemistries of metal-nitrate precursors to form metal-oxide thin films from solution: materials for electronic and energy applications
EA Cochran, KN Woods, DW Johnson, CJ Page, SW Boettcher
Journal of materials chemistry A 7 (42), 24124-24149, 2019
1002019
High-κ lanthanum zirconium oxide thin film dielectrics from aqueous solution precursors
KN Woods, TH Chiang, PN Plassmeyer, MG Kast, AC Lygo, AK Grealish, ...
ACS Applied Materials & Interfaces 9 (12), 10897-10903, 2017
442017
Impact of relative humidity during spin-deposition of metal oxide thin films from aqueous solution precursors
PN Plassmeyer, G Mitchson, KN Woods, DC Johnson, CJ Page
Chemistry of Materials 29 (7), 2921-2926, 2017
362017
Aluminum oxide thin films from aqueous solutions: Insights from solid-state NMR and dielectric response
J Cui, MG Kast, BA Hammann, Y Afriyie, KN Woods, PN Plassmeyer, ...
Chemistry of Materials 30 (21), 7456-7463, 2018
332018
Non-uniform composition profiles in inorganic thin films from aqueous solutions
KC Fairley, DR Merrill, KN Woods, J Ditto, C Xu, RP Oleksak, ...
ACS Applied Materials & Interfaces 8 (1), 667-672, 2016
252016
Influence of composition and processing parameters on the properties of solution-processed aluminum phosphate oxide (AlPO) thin films
KM Norelli, PN Plassmeyer, KN Woods, BA Glassy, CC Knutson, ...
Solid State Sciences 55, 8-12, 2016
212016
Thermal atomic layer deposition of ruthenium metal thin films using nonoxidative coreactants
S Cwik, KN Woods, MJ Saly, TJ Knisley, CH Winter
Journal of Vacuum Science & Technology A 38 (1), 2020
192020
Same Precursor, Two Different Products: Comparing the Structural Evolution of In–Ga–O “Gel-Derived” Powders and Solution-Cast Films Using Pair Distribution Function Analysis
SR Wood, KN Woods, PN Plassmeyer, DA Marsh, DW Johnson, CJ Page, ...
Journal of the American Chemical Society 139 (15), 5607-5613, 2017
172017
Helium and neon diffusion in amorphous GeO2, a sodium borosilicate glass, and fused quartz
KN Woods, RH Doremus
Phys. Chem. Glasses 12 (2), 69-74, 1971
161971
Low-temperature steam annealing of metal oxide thin films from aqueous precursors: Enhanced counterion removal, resistance to water absorption, and dielectric constant
KN Woods, PN Plassmeyer, DH Park, LJ Enman, AK Grealish, BL Kirk, ...
Chemistry of Materials 29 (19), 8531-8538, 2017
132017
Application of HAADF STEM image analysis to structure determination in rotationally disordered and amorphous multilayered films
G Mitchson, J Ditto, KN Woods, R Westover, CJ Page, DC Johnson
Semiconductor Science and Technology 31 (8), 084003, 2016
132016
Tunable high-κ Zr x Al 1− x O y thin film dielectrics from all-inorganic aqueous precursor solutions
KN Woods, EC Waddington, CA Crump, EA Bryan, TS Gleckler, ...
RSC advances 7 (62), 39147-39152, 2017
102017
Nonuniform composition profiles in amorphous multimetal oxide thin films deposited from aqueous solution
KN Woods, MC Thomas, G Mitchson, J Ditto, C Xu, D Kayal, KC Frisella, ...
ACS applied materials & interfaces 9 (42), 37476-37483, 2017
92017
Composition-property relationships in high-κ LaxZr1-xOy thin films from aqueous solution
KN Woods, DM Hamann, CJ Page
Solid State Sciences 75, 34-38, 2018
52018
Solution-Processed Li2O–Al2O3/TiO2 Nanolaminate Stacks Containing Mobile Lithium Ions and with Increased Breakdown Voltages
DR Clayton, D Lepage, KN Woods, CJ Page, MC Lonergan
ACS Applied Materials & Interfaces 12 (1), 1241-1249, 2019
42019
Etching of metal oxides using fluorine and metal halides
KN Woods, Z Cui, M Saly
US Patent 11,239,091, 2022
12022
Thermal atomic layer deposition of rhenium nitride and rhenium metal thin films using methyltrioxorhenium
S Cwik, KN Woods, SS Perera, MJ Saly, TJ Knisley, CH Winter
Dalton Transactions 50 (48), 18202-18211, 2021
12021
Amorphous metal oxide thin films from aqueous precursors: New routes to high-κ dielectrics, impact of annealing atmosphere humidity, and elucidation of non-uniform composition …
KN Woods
University of Oregon, 2017
12017
Silyl pseudohalides for silicon containing films
KN Woods, C Trinh, M Saly, MA Balseanu, M Maldonado-Garcia, ...
US Patent 11,932,940, 2024
2024
Multilayer encapsulation stacks by atomic layer deposition
C Trinh, MA Balseanu, M Maldonado-Garcia, N Li, M Saly, BJ Bhuyan, ...
US Patent 11,732,356, 2023
2023
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