Comparison of effective transverse piezoelectric coefficients e31, f of Pb (Zr, Ti) O3 thin films between direct and converse piezoelectric effects Y Tsujiura, S Kawabe, F Kurokawa, H Hida, I Kanno Japanese Journal of Applied Physics 54 (10S), 10NA04, 2015 | 91 | 2015 |
Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy P Pal, K Sato, MA Gosalvez, Y Kimura, KI Ishibashi, M Niwano, H Hida, ... Journal of microelectromechanical systems 18 (6), 1345-1356, 2009 | 73 | 2009 |
Lead-free piezoelectric MEMS energy harvesters of (K, Na) NbO3 thin films on stainless steel cantilevers Y Tsujiura, E Suwa, F Kurokawa, H Hida, K Suenaga, K Shibata, I Kanno Japanese Journal of Applied Physics 52 (9S1), 09KD13, 2013 | 60 | 2013 |
Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples MA Gosalvez, P Pal, N Ferrando, H Hida, K Sato Journal of Micromechanics and Microengineering 21 (12), 125007, 2011 | 49 | 2011 |
Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution P Pal, K Sato, MA Gosalvez, B Tang, H Hida, M Shikida Journal of Micromechanics and Microengineering 21 (1), 015008, 2010 | 49 | 2010 |
Fabrication of a quartz tuning-fork probe with a sharp tip for AFM systems H Hida, M Shikida, K Fukuzawa, S Murakami, K Sato, K Asaumi, Y Iriye, ... Sensors and Actuators A: Physical 148 (1), 311-318, 2008 | 47 | 2008 |
Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement K Shimizu, H Sasaki, H Hida, H Fujita, K Obinata, M Shikida, E Nagamori Biomedical microdevices 12, 247-252, 2010 | 40 | 2010 |
Airflow energy harvester of piezoelectric thin-film bimorph using self-excited vibration Y Tsujiura, E Suwa, T Nishi, F Kurokawa, H Hida, I Kanno Sensors and Actuators A: Physical 261, 295-301, 2017 | 38 | 2017 |
Crystallographic contributions to piezoelectric properties in PZT thin films G Tan, K Maruyama, Y Kanamitsu, S Nishioka, T Ozaki, T Umegaki, ... Scientific Reports 9 (1), 7309, 2019 | 36 | 2019 |
Chemotaxis assay of plant-parasitic nematodes on a gel-filled microchannel device H Hida, H Nishiyama, S Sawa, T Higashiyama, H Arata Sensors and Actuators B: Chemical 221, 1483-1491, 2015 | 27 | 2015 |
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining B Tang, M Shikida, K Sato, P Pal, H Amakawa, H Hida, K Fukuzawa Journal of Micromechanics and Microengineering 20 (6), 065008, 2010 | 23 | 2010 |
Fabrication of high-efficiency piezoelectric energy harvesters of epitaxial Pb (Zr, Ti) O3 thin films by laser lift-off E Suwa, Y Tsujiura, F Kurokawa, H Hida, I Kanno Energy Harvesting and Systems 3 (1), 61-67, 2016 | 20 | 2016 |
Anisotropic etching on Si {1 1 0}: Experiment and simulation for the formation of microstructures with convex corners P Pal, MA Gosalvez, K Sato, H Hida, Y Xing Journal of Micromechanics and Microengineering 24 (12), 125001, 2014 | 20 | 2014 |
Reliability of vibration energy harvesters of metal-based PZT thin films Y Tsujiura, E Suwa, F Kurokawa, H Hida, I Kanno Journal of Physics: Conference Series 557 (1), 012096, 2014 | 19 | 2014 |
Transparent piezoelectric thin-film devices: Pb (Zr, Ti) O3 thin films on glass substrates K Ueda, SH Kweon, H Hida, Y Mukouyama, I Kanno Sensors and Actuators A: Physical 327, 112786, 2021 | 16 | 2021 |
Simple millimeter-scale robot using Pb (Zr, Ti) piezoelectric thin film actuator on titanium substrate H Hida, Y Morita, F Kurokawa, Y Tsujiura, I Kanno Microsystem Technologies 22, 1429-1436, 2016 | 15 | 2016 |
Compositional dependence of Ba (Zr0. 2Ti0. 8) O3–(Ba0. 7Ca0. 3) TiO3 piezoelectric thin films prepared by combinatorial sputtering F Kurokawa, A Mori, Y Tsujiura, H Hida, I Kanno Thin Solid Films 588, 34-38, 2015 | 15 | 2015 |
Electromechanical properties of BaTiO3-xBaSnO3 thin films prepared via combinatorial sputtering H Cheng, H Hida, J Ouyang, I Kanno Ceramics International 43 (1), 1597-1601, 2017 | 14 | 2017 |
Compositional dependence of Pb (Mg1/3, Nb2/3) O3–PbTiO3 piezoelectric thin films by combinatorial sputtering F Kurokawa, Y Tsujiura, H Hida, I Kanno Japanese Journal of Applied Physics 53 (9S), 09PA06, 2014 | 13 | 2014 |
Micro fabrication of lead-free (K, Na) NbO3 piezoelectric thin films by dry etching F Kurokawa, R Yokokawa, H Kotera, F Horikiri, K Shibata, T Mishima, ... Micro & Nano Letters 7 (12), 1223-1225, 2012 | 10 | 2012 |