Sarathi Roy
Sarathi Roy
Engineer, ASML
Verified email at asml.com
Title
Cited by
Cited by
Year
Radially Polarized Light for Detection and Nanolocalization of Dielectric Particles on a Planar Substrate
S. Roy, K. Ushakova, Q. van den Berg, S. F. Pereira, H. P. Urbach
Physical Review Letters 114 (103903), 2015
652015
Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry
N Kumar, P Petrik, GKP Ramanandan, O El Gawhary, S Roy, SF Pereira, ...
Optics express 22 (20), 24678-24688, 2014
302014
Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
S Roy, N Kumar, SF Pereira, HP Urbach
Journal of Optics 15 (7), 075707, 2013
222013
Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrology
N Kumar, O El Gawhary, S Roy, VG Kutchoukov, SF Pereira, W Coene, ...
Metrology, Inspection, and Process Control for Microlithography XXVI 8324 …, 2012
202012
Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface
S Roy, AC Assafrao, SF Pereira, HP Urbach
Optics express 22 (11), 13250-13262, 2014
172014
Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning
N Kumar, O El Gawhary, S Roy, SE Pereira, HP Urbach
Journal of the European Optical Society-Rapid Publications 8, 2013
132013
Scanning effects in coherent fourier scatterometry
S Roy, O El Gawhary, N Kumar, SF Pereira, HP Urbach
Journal of the European Optical Society-Rapid Publications 7, 2012
132012
Exploiting evanescent-wave amplification for subwavelength low-contrast particle detection
S Roy, SF Pereira, HP Urbach, X Wei, O El Gawhary
Physical Review A 96 (1), 013814, 2017
122017
Determination of the full scattering matrix using coherent Fourier scatterometry
N Kumar, L Cisotto, S Roy, GKP Ramanandan, SF Pereira, HP Urbach
Applied optics 55 (16), 4408-4413, 2016
102016
High speed low power optical detection of sub-wavelength scatterer
S Roy, M Bouwens, L Wei, SF Pereira, HP Urbach, P van der Walle
Review of Scientific Instruments 86 (12), 2015
52015
Phase information in coherent Fourier scatterometry
N Kumar, O El Gawhary, S Roy, SF Pereira, HP Urbach
Optical Measurement Systems for Industrial Inspection VIII 8788, 87881P, 2013
22013
Method and Apparatus for Detecting Substrate Surface Variations
JFMDA Van, T Druzhinina, N Kumar, ROY Sarathi, YS Huang, ...
US Patent App. 16/624,609, 2020
12020
Sub-wavelength metrology using coherent fourier scatterometry
S Roy
12016
Methods using fingerprint and evolution analysis
J Van Dongen, WT Tel, ROY Sarathi, Y Zhang, A Cavalli, BL Sjenitzer, ...
US Patent App. 16/973,395, 2021
2021
Determining a correction to a process
ROY Sarathi, EM Hulsebos, R Werkman, R Junru
US Patent App. 17/174,159, 2021
2021
Computational metrology based correction and control
M Rijpstra, CJH Lambregts, WT Tel, ROY Sarathi, CD Grouwstra, ...
US Patent App. 16/954,384, 2021
2021
Computational metrology based sampling scheme
WT Tel, Y Zhang, ROY Sarathi
US Patent App. 16/959,736, 2020
2020
Optimizing an apparatus for multi-stage processing of product units
N Jelle, A Ypma, D Gkorou, G Tsirogiannis, RJ Van Wijk, C Tzu-Chao, ...
US Patent App. 16/486,859, 2020
2020
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
N Kumar, AJH Schellekens, ST VAN DER POST, F Zijp, WMJM Coene, ...
US Patent App. 16/331,547, 2019
2019
Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry
S Roy, N Kumar, SF Pereira, HP Urbach
Fringe 2013, 43-48, 2014
2014
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Articles 1–20