Sarah Bobek
Sarah Bobek
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Cited by
Cited by
2‐Dimensional Transition Metal Dichalcogenides with Tunable Direct Band Gaps: MoS2(1–x)Se2x Monolayers
J Mann, Q Ma, PM Odenthal, M Isarraraz, D Le, E Preciado, D Barroso, ...
Advanced Materials 26 (9), 1399-1404, 2014
Chemical Vapor Deposition Growth of Few-Layer MoTe2 in the 2H, 1T′, and 1T Phases: Tunable Properties of MoTe2 Films
TA Empante, Y Zhou, V Klee, AE Nguyen, IH Lu, MD Valentin, ...
ACS nano 11 (1), 900-905, 2017
Superlinear Composition-Dependent Photocurrent in CVD-Grown Monolayer MoS2(1–x)Se2x Alloy Devices
V Klee, E Preciado, D Barroso, AE Nguyen, C Lee, KJ Erickson, M Triplett, ...
Nano letters 15 (4), 2612-2619, 2015
Highly etch selective amorphous carbon film
S Bobek, PK KULSHRESHTHA, R Prasad, KD Lee, H Whitesell, H Oshio, ...
US Patent 10,727,059, 2020
Postgrowth tuning of the bandgap of single-layer molybdenum disulfide films by sulfur/selenium exchange
Q Ma, M Isarraraz, CS Wang, E Preciado, V Klee, S Bobek, K Yamaguchi, ...
Acs Nano 8 (5), 4672-4677, 2014
Band structure characterization of WS2 grown by chemical vapor deposition
I Tanabe, M Gomez, WC Coley, D Le, EM Echeverria, G Stecklein, ...
Applied Physics Letters 108 (25), 2016
Chemical vapor deposition growth of a periodic array of single-layer MoS2 islands via lithographic patterning of an SiO2/Si substrate
D Sun, AE Nguyen, D Barroso, X Zhang, E Preciado, S Bobek, V Klee, ...
2D Materials 2 (4), 045014, 2015
An MoSx structure with high affinity for adsorbate interaction
D Sun, W Lu, D Le, Q Ma, M Aminpour, M Alcántara Ortigoza, S Bobek, ...
Angewandte Chemie-German Edition 124 (41), 10430, 2012
Single- and few-layer transfer-printed CVD MoS2nanomechanical resonators with enhancement by thermal annealing
H Jia, R Yang, AE Nguyen, SN Alvillar, S Bobek, M Wurch, CY Huang, ...
2016 IEEE International Frequency Control Symposium (IFCS), 1-3, 2016
Characterization of film materials in wafer processing technology development by XPS
G Saheli, W Liu, C Lazik, Y Uritsky, M Bevan, W Tang, P Ma, ...
Journal of Electron Spectroscopy and Related Phenomena 231, 57-67, 2019
Electrostatic chucking process
SM Bobek, VSC Parimi, PK Kulshreshtha, KD Lee
US Patent App. 16/848,553, 2020
An STM Study of Molecular Self-Assemblies on Cu (111): Structure, Interaction, and Effects of Confinement
M Luo
UC Riverside, 2012
Methods and apparatus for minimizing substrate backside damage
L Hu, AA Khaja, SM Bobek, PK Kulshreshtha, Y Suzuki
US Patent App. 18/233,751, 2023
Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers
K Nittala, SM Bobek, KD Lee, R Limdulpaiboon, D Kioussis, ...
US Patent App. 18/206,037, 2023
Electrostatic chuck design with improved chucking and arcing performance
AA Khaja, VSC Parimi, SM Bobek, PK Kulshreshtha, VK Prabhakar
US Patent App. 18/201,086, 2023
Method of in situ ceramic coating deposition
SM Bobek, AA Khaja, R Limdulpaiboon, KD Lee
US Patent App. 18/143,648, 2023
Pedestal for substrate processing chambers
SM Bobek, VSC Parimi, PK Kulshreshtha, VK Prabhakar, KD Lee, S Ha, ...
US Patent App. 18/111,842, 2023
Method of in situ ceramic coating deposition
SM Bobek, AA Khaja, R Limdulpaiboon, KD Lee
US Patent 11,674,222, 2023
Downstream residue management hardware
Z Ge, Y Xiong, S Ha, AA Khaja, A Bansal, P Poomani, AL Kulkarni, ...
US Patent App. 17/502,873, 2023
Targeted heat control systems
VSC Parimi, S Radhakrishnan, MIN Xiaoquan, SM Bobek, S Ha, ...
US Patent 11,600,470, 2023
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